Wet Station

Wet Station

규격
(1) Laser Microscope
- 측정 원리 : 레이저 공초점, 백색간섭
- 종합 배율 : 28,000배 이상
- 광학 해상도 : 0.02um 이상
- 최대 촬영 해상도 : 2480×1536 이상
- 스캔 정밀도 : 높이 0.020um 이하

(2) 스테이지 구성
- Wafer size : 300 mm
- XY 수동 가동 범위 : 70×70mm 이상
- XY 자동 가동 범위 : 100×100mm 이상
Tilting stage : ±5°

전자빔 증착장비
- 고출력 전자빔을 이용하여 Metal Source 를 증발시켜 Wafer(기판)표면에 증착시키는 장치

1) Precision LCR Meter : 1 ea

2) Signal Generator with built-in step attenuator : 2 ea

Specifications (규격사항)

1) Precision LCR Meter

-Test frequency : 1 MHz to 3 GHz or more

-Frequency resolution : 100 kHz or less

-List-sweep : 32 points per sweep x 8 traces

-Impedance parameters : |Z| θz (rad) θz (deg) |Y| θy (rad) θy (deg) X G

B Ls Lp Cs Cp Rs Rp Q D or more

-Display resolutions 5 digits or more

-Test signal level

. V (open condition): 4.47 mVrms ~ 502 mVrms or more

. I (short condition): 0.0894 mArms ~ 10 mArms or more

-Basic accuracy : less than ± 1.0%

-Measurement range : 200 mohm to 3 kohm or more

-Measurement time : 9 msec per point or less

-Measurement terminal : 3.5 mm (female)

-Calibration and compensation : open/short/load/low-loss capacitor calibration

fixture electrical length compensation open/short compensation

-Rdc measurement function : on/off selectable

-Data storage devices : 18 GB internal hard disk and 1.44 Mbyte floppy disk

-Interface : GPIB LAN (10base-T/100base-TX

1) mmWave Spectrum Analyzer
- Wide dynamic range
- 2dB step attenuator
- Displayed average noise level of 154dBm
- TOI of +17dBm
- Up to 110dB of calibrated log display range
- 1.4:1 of RBW selectivity
- Excellent phase noise -113dBc/Hz at 10KHz offset
- Absolute amplitude accuracy of 0.62dB
- Optimized phase noise selectable close-in/far-out
- Swept sine sweep mode and FFT mode
- Spot offset phase noise measurement
- Multi-offset ACP measurement
- Comprehensive one-button power measurements
- Link capability with ADS and VSA software

2) Power Meter
- Peak Average and 4-simultaneous Time-gated power Measurements
- Fast measurement speed up to 1000 rds./sec
- Pre-defined configuration for 3G wireless communication
- Large 4-line measurement LCD display
- Store up to 10 instrument configurations
- Analysis software with run-time of Visual Eng. Environments Smart
Sensor compatibility