[Cleaning]Spin Dryer
? Wafer size : 2, 4, 5, 6 inch
? RPM Range : 0 ~ 3500 (공정별 Step 제어)
? Exhaust : PVC 40A
? Drain : PVC PIPE 32A
? N2 Supply : 3/8“ SUS316L tube
? DI Supply : 1 ~ 7 LPM
? System specifications
- Capacity : 1 Wafer carrier up to 6“
- Outer Dimensions (Rinse/Dryer) : 18.87“ Wide * 26.25” deep * 20.50“ high
- Bowl Dimension : 11.25“ ID by 9.31” Deep
- DI nozzels : 6
- Drain : 1.5“ NPT
- Rinse Cycle : 0 to 3200 RPM
- Dry Cycle : 0 to 3200 RPM
- Rinse Timer : 0 to 9999 Seconds
- Rinse Timer : 0 to 9999 Seconds
? DI Water : 1.75 gpm 25psi (3/8“)
? DI Return : 5 psi (3/8“)
? System N2 : 3.0 ~ 4.0 cfm
? Electrical : 15AMP 120VAC 50/60Hz
